行业方案
Wafer Robot
Domestic wafer semiconductors are rapidly entering the market, and Sorter/EFEM/Robot products have great potential.
iNexBot wafer robot solution has been specifically tailored to meet the needs of the semiconductor industry. It has high reliability and stability, with production efficiency comparable to imported solutions and adherence to SEMI certification requirements. iNexBot is the ideal partner for wafer equipment manufacturers.
Wafer Semiconductor Type
According to different product types, they can be categorized as follows:
Atmospheric Wafer Robot
Vacuum Wafer Robot
EFEM (Equipment Front End Module)
EFEM (Equipment Front End Module) is a part of semiconductor production equipment, consisting primarily of chemical vapor filters, air filters, ion generators, wafer transport robots, wafer alignment devices, wafer loadports, and automation control modules.
Among them, the wafer loading system (Loadport), wafer transport robot (Robot), and wafer alignment device (Aligner) are the three core components.
Wafer Sorter
Wafer Sorter is a process equipment used in the semiconductor manufacturing industry. It guarantees the cleaning requirements of the flipping process through the micro-environment inside the equipment, and realizes Wafer off-line, pre-process batch handling, post-process merging, inter-process flipping control, as well as product factory verification and sorting.
Loadport Cassette
AMHS (Automated Material Handling System)
